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DIN EN 60204-33 VDE 0113-33:2011-11
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DIN EN 60204-33 VDE 0113-33:2011-11
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified); German version EN 60204-33:2011More info
This part of DIN EN 60204 (VDE 0113) applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1000 V for alternating current and not exceeding 1500 V for direct current, and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.
| Author | VDE |
|---|---|
| Editor | VDE |
| Document type | Standard |
| Format | Paper |
| ICS | 13.110 : Safety of machinery
31.080.01 : Semiconductor devices in general |
| Number of pages | 133 |
| Replace | DIN IEC 60204-33 (2006-11) |
| Cross references | EN 60204-33 (2011-03), IDT |
| Weight(kg.) | 0.3261 |
| Year | 2011 |
| Document history | DIN EN 60204-33 (2011-11) |
| Country | Germany |
| Keyword | DIN EN 60204;EN 60204;EN 60204-33;60204 |