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VDI 2083 Blatt 8.1:2014-10

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VDI 2083 Blatt 8.1:2014-10

Cleanroom technology - Air cleanliness chemical concentration (ACC)

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This standard deals with the chemical contamination of clean environments. It describes the phenomenon as such, metrology and control of air contamination by gaseous chemicals. This standard has been harmonised with the standard DIN EN ISO 14644-8; the latter, however does not addres the subjects of metrology or control of airborne chemical contamination (formerly termed AMC).

Author VDI
Editor VDI
Document type Standard
Format File
ICS 13.040.35 : Cleanrooms and associated controlled environments
Number of pages 56
Replace VDI 2083 Blatt 8.1 (2009-07)
Set VDI-Handbuch Reinraumtechnik
Year 2014
Document history VDI 2083 Blatt 8.1 (2014-10)
Country Germany
Keyword VDI 2083;2083