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VDI/VDE 2655 Blatt 1.2:2010-10 (R2018)

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VDI/VDE 2655 Blatt 1.2:2010-10 (R2018)

Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

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The guideline describes procedures for the Calibration of confocal microscopes and depth setting standards for roughness measurement and establish thereby the basic for traceability of measuring systems to national standars. First the procedure of determination of the calibration abilities is described. Further basic conditions for the calibration as well as minimum requirements to the calibration procedure are specified. Finally the requirements to the calibration report are specified. A GUM conformal model for the determination of the uncertainty of measurement completes the instructions.

Author VDI
Editor VDI
Document type Standard
Format File
Confirmation date 2018-12-01
ICS 17.180.01 : Optics and optical measurements in general
37.020 : Optical equipment
Number of pages 36
Replace VDE/VDI 2604 (1971-06)
Set VDI/VDE-Handbuch Fertigungsmesstechnik,VDI/VDE-Handbuch Optische Technologien,VDI-Handbuch Produktionstechnik und Fertigungsverfahren Band 3
Year 2010
Document history VDI/VDE 2655 Blatt 1.2 (2010-10)
Country Germany
Keyword VDI 2655;VDI 2655 Blatt 1.2;VDI/VDE 2655;2655